How to export EUV mask geomtry from FDTD into MATLAB ?

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Hala
Hala 2023-12-5
回答： Mathy 2024-8-23
I would like to to perform Monte Carlo simulation on EUV mask blank. I already simulated the structure in FDTD. Is there any way that I can export the structure into MATLAB?

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回答（1 个）

Mathy
Mathy 2024-8-23
Hi Hala,
I understand that you would like to import an FDTD simulation into MATLAB. Unfortunately, there are no built-in methods for this at the moment. However, there is a workaround available in a MATLAB Answer that explains how to extract points in 3D from scenario meshes. For more details, you can refer to the MATLAB Answer linked below:
https://www.mathworks.com/matlabcentral/answers/2118586-importing-geometry-from-cell-data-for-3d-model
Hope this helps!

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